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  • Offer Profile
  • 中心has been developing and realizing innovative thermal solutions for over 50 years. As a leading and globally operating technology group, we offer production solutions for the photovoltaic, semiconductor and microelectronic industries.

    The continuous further development of our successful solutions in thermal processing and coating, such as for manufacturing crystalline solar cells and power semiconductors, form the basis for our successful partnerships with industry, research and development.

产品介绍

  • 光伏

  • Diffusion, oxidation and plasma coating processes, as well as thermal processing of mono and multi-crystalline solar cells are among the core competencies of centrotherm. Our production systems are being utilized around the globe and have a proven track record in terms of process stability and machine availability in the complex mass production of solar cells. Our vast process expertise, research & development experience, as well as our in-house cell development also enable us to offer engineering services, comprehensive process consulting services, technology packages and even fully integrated production solutions. Our sustainable manufacturing concepts of today are already designed for tomorrow’s process technology and can be readily and expediently upgraded. Therefore, it is possible to integrate new cell concepts, such as our centaurus technology or alternative coating or laser processes, into existing production lines.

    作为光伏行业的开拓者之一，Centrotherm指挥了30多年的经验，并已成为全球领先的细胞制造商的强大合作伙伴。我们一直在追求降低每瓦峰的生产成本的目标，并使光伏解决方案成功地与传统的能源产生竞争。在这个市场上写了一个真正独一无二的成功故事后，我们已经实施了50多个交钥匙生产线和2000多个单个流程系统，这意味着我们具有突出的安装生产能力，并且在光伏市场。

      • DIFFUSION FURNACE

      • Tube furnace for diffusion, oxidation and annealing in c-Si solar cell processing

        过程es
        Diffusion (POCl3, BBr3, BCl3)
        退火
        湿氧化（可选：DCE，HCL）
        根据要求进一步处理

      • 低压扩散炉

      • 低压扩散工艺的管炉

        过程es
        POCL3扩散
        BBr3 Diffusion

      • PECVD系统

      • C-SI太阳能电池处理中用于钝化和氮化物涂层的批处理系统

        过程es
        PECVD氮化物
        PECVD-Oxide
        PECVD-氧化物
        多层
        根据要求进一步处理

      • 快速燃烧炉

      • 内联熔炉，用于联合烧蚀和金属化烧结

        过程es
        触发前侧金属化合金的后侧接触金属化糊状的干燥

      • 研发系统

      • Batch-type system for R&D c-Si solar cell applications

        过程es
        Atmospheric
        扩散|氧化|烧结|退火
        低压
        氧化物|氮化物|氧硝酸盐
        LPCVD
        Polysilicon | Siliziumnitride | Oxide | Oxinitride

      • FULL PRODUCTION SOLUTIONS

      • From planning to start-up to finished solar cell
        我们的完整生产解决方案计划为您提供了针对您对单声道和多晶体太阳能电池生产的要求量身定制的生产线。这些服务的范围包括Centrotherm核心流程以及我们指定的OEM过程系统和各自的自动化解决方案。得益于整体过程的完美详细协调，我们可以保证与低生产成本有关的关键性能参数，例如太阳能电池效率，生产吞吐量和产量。

    • SEMICONDUCTOR

    • 作为半导体行业生产设备的主要开发商和制造商之一，我们为各种技术和应用提供了广泛的流程，例如逻辑和记忆设备（例如闪光灯，DRAM），功率半导体（例如SI，SI，SIC），LED，SMT，MEMS或传感器技术。
      • 退火(e.g. implant annealing, diffusion),
      • Formation (e.g. LPCVD, plasma oxidation, RTO)
      • 层的修饰（例如氧化物硝化和硅化氧化物形成）
      Our team of highly qualified process engineers devises innovative solutions for the ever more exacting demands of the industry, which mandate the availability of electronic components that are becoming increasingly miniaturized, while offering more functions and higher speed than the previous generation. Therefore the following equipment is applied:
      • 水平和垂直批处理系统（大气或真空过程）
      • Single wafer systems (RTP, low-temperature microwave oxidation)
      • 垂直高温炉（将退火高达2000°C，氧化高达1350°C）

        • Activator 150

        • 用于SIC和GAN退火和石墨烯生长的高温炉

          过程
          退火

        • OXIDATOR 150

        • 高温氧化炉

          过程
          氧化

        • Verticoo 200

        • 垂直的晶片process system for mass production

          过程es
          退火
          Diffusion
          LPCVD

        • Verticoo Mini

        • Wafer process system for small-size production and R&D

          过程es
          退火
          氧化
          Diffusion
          LPCVD
          PECVD

        • E2000

        • 质量生产的晶圆处理系统

          过程es
          退火
          氧化
          Diffusion
          LPCVD
          PECVD

        • E1550

        • 中小型生产的晶圆工艺系统

          过程es
          退火
          氧化
          Diffusion
          LPCVD
          PECVD

        • E1200

        • Wafer process system for small-size production and R&D

          过程es
          退火
          氧化
          Diffusion
          LPCVD
          PECVD

        • c.plasmoxlt

        • Low temperature microwave plasma oxidation

          过程es
          Plasma oxidation
          硝化
          原位退火

        • c.RAPID200

        • Rapid Thermal Processing for compound semiconductor and silicon

          过程es
          离子植入物退火
          硅化硅形成（Ti，Co，Ni，Pt等）
          氧化
          PSG反流
          金属化退火
          Further applications

      • MICROELECTRONICS

      • 作为微电子行业生产设备的长期开发商和制造商，我们为广泛的技术和应用提供了广泛的热激活过程，例如厚实的膜过程或DCB，LTCC和MLCC制造：
        • 电力半导体，光电和高温组件（大气和高压）的焊接
        • Drying and sintering for thick film technologies (DS)
        • 低温辅助陶瓷（LTCC）的发射过程
        • Firing processes for Multi Layer Chip Capacity (MLCC)
        • Remelting and connection processes for Direct Copper Bonding (DCB)
        我们的高素质流程工程师团队为行业越来越严格的需求设计了创新的解决方案，该解决方案要求电子组件的可用性越来越小，这些电子组件越来越微型化，同时提供了比上一代更高的功能和更高的速度：
        • 氧化，还原和被动过程条件
        • 最佳的热过渡和有效的冷却技术
        • Exact and repeatable temperature control thanks to digital state-of-the-art measuring and control functions
        • Particle-free and low-mass transport apparatus for highly sensitive components
        • 温度范围为20 - 2000°C（根据应用）

          • VLO 180 | VLO 300

          • Vacuum Soldering Systems for high volume production Processes - Advanced Packaging - Power Semiconductors - Sealing - Soldering

            过程es
            Advanced
            打包
            力量
            Semiconductors
            Sealing
            焊接

          • VLO 20

          • 用于少量生产和研发的真空焊接系统

            过程es
            Advanced Packagingg
            力量Semiconductors
            Sealing
            焊接

          • Vlo 6 |VLO 12

          • Vacuum Soldering Systems for Advanced Packaging and R&D

            过程es
            Advanced Packaging
            力量
            Semiconductors
            Sealing
            焊接

          • VLO HP

          • High-Pressure Vacuum Soldering System for Advanced Packaging

            过程es
            力量Semiconductors
            Advanced Packaging
            Hybrid Microelectronic Assemblies
            Optoelectronic Packaging
            Hermetic Package Sealing
            晶圆级包装
            UHB LED Packaging
            MEMS包装密封

          • Conveyor Furnace DO-DS

          • Conveyor furnace for serial production and R&D

            过程es
            厚膜
            MLCC
            LTCC
            DCB
            退火（100％H2）
            格拉斯/金属密封

        • 客户服务

            • 光伏

            • We develop and manufacture highly efficient thermal process systems that are designed to meet stringent standards with regard to high availability and productivity. Our customers use our equipment around the world around the clock and place their trust in its absolute reliability. In order to be able to continuously guarantee that we meet these expectations, we have established a global service network that warrants that you will enjoy first rate services paired with expeditious response times at all times.

              除了维修，维护和维修工作外，我们还在您的身边，您的经验丰富的合作伙伴伴随您的生产运营，提供流程咨询服务，升级，培训计划以及机器翻新和搬迁。

            • 半导体和微电子学

            • 我们为半导体行业的客户提供工程和过程技术服务。调试后，我们将继续为客户提供服务和咨询服务，并通过升级进一步改善现有生产系统。

              一眼我们的服务
              • Delivery, assembly and commissioning of production systems on-site
              • Training of customer staff in the operation of production systems
              • 购买生产系统连续运行所需的替换零件
              • 正在进行的生产过程中的系统的补充服务和咨询（例如远程系统）
              • 遥控和维护确保快速分析和系统错误的故障排除
              • 过程和生产阶段的优化
              • 维修服务
              • 改装，翻新和设备升级